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A library plus a collection of Jupyter notebooks for the development of optical metrology techniques.

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LMet - LTM Metrology software suite

A library plus a collection of Jupyter notebooks for the development of optical metrology techniques focused on scatterometry and hybrid metro.

  • easy geometrical modeling with user expandable instructions set
  • direct problem solving using 1D MMFE (RCWA-like) electromagnetic code
  • inverse problem : classical, library method, ...
  • includes Fresnel code for fast optical indices determination
  • designed to be used within Jupyter notebook (examples included)

Getting Started

Get Jupyter working on your computer. Download the tree. Play with the example notebooks.

Authors

  • S. SOULAN - Initial software work
  • D. FUARD, J.-H. TORTAI - MMFE part
  • All the past & present LTM metrology contributors

License

This project is licensed under the CeCILL License - see the Licence_CeCILL_V2.1-en.txt file for details

Acknowledgments

  • LTM, Laboratoire des Technologies de la microélectronique. ltmlab.fr
  • Université Grenoble Alpes
  • Centre National de la Recherche Scientifique
  • This work was partly supported by the french RENATECH network

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A library plus a collection of Jupyter notebooks for the development of optical metrology techniques.

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