num_lines = 20,
line_width = 0.4,
diameter = 20,
layer = 0
)
qp(D) # quickplot the geometry
create_image(D, 'litho_star')
# example-litho_calipers
import phidl.geometry as pg
from phidl import quickplot as qp
D = pg.litho_calipers(
notch_size = [1,5],
notch_spacing = 2,
num_notches = 7,
offset_per_notch = 0.1,
row_spacing = 0,
layer1 = 1,
layer2 = 2)
qp(D) # quickplot the geometry
create_image(D, 'litho_calipers')
# example-extract
import phidl.geometry as pg
from phidl import quickplot as qp
from phidl import Device
E = Device()
E.add_ref(pg.ellipse(layer = {0,1}))
#X = pg.ellipse(layer = {0,1})
D = pg.extract(E, layers = [0,1])
# experimental and may change with time.
# Let's save this file so we can practice importing it in the next step
D.write_gds('MyNewGDS.gds')
#==============================================================================
# Premade geometry: Lithography shapes
#==============================================================================
# PHIDL comes with a set of handy functions for creating standard lithographic
# test structures, such as calipers (for detecting fabrication-layer-offsets),
# stars, and positive + negative-tone steps
D = Device()
d1 = D << pg.litho_calipers(notch_size=[3, 10],
notch_spacing=2,
num_notches=7,
offset_per_notch=0.2,
row_spacing=0,
layer1=1,
layer2=2).rotate(90)
d2 = D << pg.litho_steps(
line_widths=[1, 2, 4, 8, 16
], line_spacing=10, height=80, layer=0).movex(80)
d3 = D << pg.litho_star(num_lines=16, line_width=3, diameter=80,
layer=4).movex(240)
d1.y = d2.y = d3.y
qp(D)
D.write_gds('LithographyTestStructuresMetrics.gds')
#==============================================================================
# Importing GDS files
#==============================================================================
def verniers(scale=[1, 0.5, 0.1],
layers=[1, 2],
label='TE',
text_size=20,
reversed=False):
""" Create a cell with vernier aligners.
Parameters
----------
scale : iterable of float (default [1,0.5,0.25])
each float in list is the offset of a vernier.
for each of them a vernier will be created in the X-Y axis
layers : 2-len iterable of int (default [1,2])
define the two layers for the verniers.
label : str (default "TE")
add a label to the set of verniers.
text_size : float (default)
label size
reversed : boolean
if true, creates a negative alignment mark for the second layer
Returns
-------
cell : phidl.Device.
"""
cell = dl.Device(name="verniers")
import numpy
if not isinstance(scale, numpy.ndarray):
scale = np.array(scale)
scale = np.sort(scale)
xvern = []
for dim in scale:
notch_size = [dim * 5, dim * 25]
notch_spacing = dim * 10
num_notches = 5
notch_offset = dim
row_spacing = 0
layer1 = layers[0]
layer2 = layers[1]
cal=pg.litho_calipers(\
notch_size,\
notch_spacing,\
num_notches,\
notch_offset,\
row_spacing,\
layer1,\
layer2)
cal.flatten()
if reversed:
tobedel = cal.get_polygons(by_spec=(layer2, 0))
cal = cal.remove_polygons(
lambda pts, layer, datatype: layer == layer2)
replica = dl.Device()
replica.add(gdspy.PolygonSet(tobedel, layer=layer2))
frame = dl.Device()
frame.add(pg.bbox(replica.bbox, layer=layer2))
frame_ext = dl.Device()
frame_ext.add(
gdspy.PolygonSet(frame.copy('tmp', scale=1.5).get_polygons(),
layer=layer2))
frame_ext.flatten()
frame_ext.move(origin=frame_ext.center, destination=replica.center)
new_cal = pg.boolean(replica, frame_ext, 'xor', layer=layer2)
new_cal.rotate(angle=180,
center=(cal.xmin + cal.xsize / 2, cal.ymin))
new_cal.move(destination=(0, -notch_size[1]))
cal << new_cal
cal.flatten()
xvern.append(cal)
g = dl.Group(xvern)
g.distribute(direction='y', spacing=scale[-1] * 20)
g.align(alignment='x')
xcell = dl.Device(name="x")
for x in xvern:
xcell << x
xcell = pt.join(xcell)
vern_x = cell << xcell
vern_y = cell << xcell
vern_y.rotate(angle=-90)
vern_y.move(origin=(vern_y.xmin,vern_y.y),\
destination=(vern_x.x+scale[-1]*10,vern_x.ymin-scale[-1]*10))
cell.absorb(vern_x)
cell.absorb(vern_y)
label = pg.text(text=label, size=text_size, layer=layers[0])
label.move(destination=(cell.xmax - label.xsize / 2,
cell.ymax - 2 * label.ysize))
overlabel = pg.bbox(label.bbox, layer=layers[1])
overlabel_scaled = dl.Device().add(
gdspy.PolygonSet(overlabel.copy('tmp', scale=2).get_polygons(),
layer=layers[1]))
overlabel_scaled.move(origin=overlabel_scaled.center,\
destination=label.center)
cutlab = pg.boolean(label, overlabel_scaled, 'xor', layer=layers[1])
cell << label
cell << cutlab
cell = pt.join(cell)
return cell