Ejemplo n.º 1
0

if __name__ == '__main__':

    from lens import LensList
    from tcc import TCCList
    from mask import Mask
    from source import Source
    import time

    a = time.time()
    m = Mask()
    m.x_range = [-300.0, 300.0]
    m.y_range = [-300.0, 300.0]
    m.x_gridsize = 2.5
    m.y_gridsize = 2.5
    m.openGDS('./NanGateLibGDS/NOR2_X2.gds', 11, 0.3)
    m.maskfft()

    s = Source()
    s.na = 1.35
    s.maskxpitch = m.x_range[1] - m.x_range[0]
    s.maskypitch = m.y_range[1] - m.y_range[0]
    s.type = 'annular'
    s.sigma_in = 0.7
    s.sigma_out = 0.9
    s.smooth_deta = 0.00
    s.shiftAngle = 0
    s.update()
    s.ifft()
Ejemplo n.º 2
0
                self.RIList[ii].append(self.RI)


if __name__ == "__main__":
    from tcc import TCCList, TCC
    from mask import Mask
    from source import Source
    from lens import LensList, Lens

    mp = [ [[-1,6],[-1, 2],[1, 2],[1, 1],[6, 1],[6, 0],[0, 0],[0, 1],[-2, 1],[-2, 6],[-1, 6]], \
       [[6, -1],[6, -2],[1, -2],[1, -3],[4, -3],[4, -6],[3, -6],[3, -4],[0, -4],[0, -1],[6, -1]] ]
    m = Mask()
    m.x_range = [-300.0, 300.0]
    m.y_range = [-400.0, 300.0]
    m.x_gridsize = 1.0
    m.y_gridsize = 1.0
    m.CD = 40
    m.polygons = mp
    m.poly2mask()
    m.smooth()
    m.maskfft()
    """nominal ILT setting"""
    s = Source()
    s.na = 1.35
    s.maskxpitch = 600.0
    s.maskypitch = 800.0
    s.type = 'annular'
    s.sigma_in = 0.6
    s.sigma_out = 0.8
    s.update()
    s.ifft()
Ejemplo n.º 3
0
                                                    
   
if __name__ == '__main__' :
    
    from lens import LensList
    from tcc import TCCList
    from mask import Mask
    from source import Source    
    import time
    
    a = time.time()
    m = Mask()
    m.x_range = [-300.0,300.0]
    m.y_range = [-300.0,300.0]
    m.x_gridsize = 2.5
    m.y_gridsize = 2.5
    m.openGDS('./NanGateLibGDS/NOR2_X2.gds',11,0.3)
    m.maskfft()
    
    s = Source()
    s.na = 1.35
    s.maskxpitch = m.x_range[1] - m.x_range[0]
    s.maskypitch = m.y_range[1] - m.y_range[0]
    s.type = 'annular'
    s.sigma_in = 0.7
    s.sigma_out = 0.9
    s.smooth_deta = 0.00
    s.shiftAngle = 0
    s.update()
    s.ifft()
    
Ejemplo n.º 4
0
                self.calRI()
                self.RIList[ii].append(self.RI)
                        
if __name__ == "__main__":
    from tcc import TCCList,TCC
    from mask import Mask 
    from source import Source
    from lens import LensList, Lens
    
    mp = [ [[-1,6],[-1, 2],[1, 2],[1, 1],[6, 1],[6, 0],[0, 0],[0, 1],[-2, 1],[-2, 6],[-1, 6]], \
       [[6, -1],[6, -2],[1, -2],[1, -3],[4, -3],[4, -6],[3, -6],[3, -4],[0, -4],[0, -1],[6, -1]] ]
    m = Mask()
    m.x_range = [-300.0,300.0]
    m.y_range = [-400.0,300.0]
    m.x_gridsize = 1.0
    m.y_gridsize = 1.0
    m.CD = 40
    m.polygons = mp
    m.poly2mask()
    m.smooth()
    m.maskfft()
    
    """nominal ILT setting"""
    s = Source()
    s.na = 1.35
    s.maskxpitch = 600.0
    s.maskypitch = 800.0
    s.type = 'annular'
    s.sigma_in = 0.6
    s.sigma_out = 0.8
    s.update()