def make_align_markers(self, t, w, position, layers, joy_markers=False, camps_markers=False):
if not (type(layers) == list):
layers = [layers]
top_mk_cell = Cell('AlignmentMark')
for l in layers:
if not joy_markers:
am0 = Rectangle((-w / 2., -w / 2.), (w / 2., w / 2.), layer=l)
rect_mk_cell = Cell("RectMarker")
rect_mk_cell.add(am0)
top_mk_cell.add(rect_mk_cell)
elif joy_markers:
crosspts = [(0, 0), (w / 2., 0), (w / 2., t), (t, t), (t, w / 2), (0, w / 2), (0, 0)]
crosspts.extend(tuple(map(tuple, (-np.array(crosspts)).tolist())))
am0 = Boundary(crosspts, layer=l) # Create gdsCAD shape
joy_mk_cell = Cell("JOYMarker")
joy_mk_cell.add(am0)
top_mk_cell.add(joy_mk_cell)
if camps_markers:
emw = 20. # 20 um e-beam marker width
camps_mk = Rectangle((-emw / 2., -emw / 2.), (emw / 2., emw / 2.), layer=l)
camps_mk_cell = Cell("CAMPSMarker")
camps_mk_cell.add(camps_mk)
top_mk_cell.add(camps_mk_cell, origin=[100., 100.])
top_mk_cell.add(camps_mk_cell, origin=[100., -100.])
top_mk_cell.add(camps_mk_cell, origin=[-100., 100.])
top_mk_cell.add(camps_mk_cell, origin=[-100., -100.])
self.align_markers = Cell("AlignMarkers")
self.align_markers.add(top_mk_cell, origin=np.array(position) * np.array([1, -1]))
self.align_markers.add(top_mk_cell, origin=np.array(position) * np.array([-1, -1]))
self.align_markers.add(top_mk_cell, origin=np.array(position) * np.array([1, 1]))
self.align_markers.add(top_mk_cell, origin=np.array(position) * np.array([-1, 1]))
self.add(self.align_markers)
def make_align_markers(self, t, w, position, layers, cross=False):
if not (type(layers) == list):
layers = [layers]
self.align_markers = Cell("AlignMarkers")
for l in layers:
if not cross:
am0 = Rectangle((-w / 2., -w / 2.), (w / 2., w / 2.), layer=l)
elif cross:
crosspts = [(0, 0), (w / 2., 0), (w / 2., t), (t, t), (t, w / 2), (0, w / 2), (0, 0)]
crosspts.extend(tuple(map(tuple, (-np.array(crosspts)).tolist())))
# crosspts = [(-t / 2., t / 2.), (-t / 2., h / 2.), (t / 2., h / 2.),
# (t / 2., t / 2.), (w / 2., t / 2.), (w / 2., -t / 2.),
# (t / 2., -t / 2.), (t / 2., -h / 2.),
# (-t / 2., -h / 2.), (-t / 2., -t / 2.),
# (-w / 2., -t / 2.), (-w / 2., t / 2.)]
am0 = Boundary(crosspts, layer=l) # Create gdsCAD shape
# am1 = Polygon(crosspts) #Create shapely polygon for later calculation
am1 = am0.copy().translate(tuple(np.array(position) * [1, 1])) # 850,850
am2 = am0.copy().translate(tuple(np.array(position) * [-1, 1])) # 850,850
am3 = am0.copy().translate(tuple(np.array(position) * [1, -1])) # 850,850
am4 = am0.copy().translate(tuple(np.array(position) * [-1, -1])) # 850,850
# am4 = am0.copy().scale((-1, -1)) #Reflect in both x and y-axis
self.align_markers.add([am1, am2, am3, am4])
self.add(self.align_markers)
def make_align_markers(self,
t,
w,
position,
layers,
cross=False,
auto_marks=False):
if not (type(layers) == list):
layers = [layers]
self.align_markers = Cell("AlignMarkers")
self.align_marker = Cell("AlignMarker")
for l in layers:
if not cross:
am0 = Rectangle((-w / 2., -w / 2.), (w / 2., w / 2.), layer=l)
self.align_marker.add(am0)
elif cross:
crosspts = [(0, 0), (w / 2., 0), (w / 2., t), (t, t),
(t, w / 2), (0, w / 2), (0, 0)]
crosspts.extend(
tuple(map(tuple, (-np.array(crosspts)).tolist())))
# crosspts = [(-t / 2., t / 2.), (-t / 2., h / 2.), (t / 2., h / 2.),
# (t / 2., t / 2.), (w / 2., t / 2.), (w / 2., -t / 2.),
# (t / 2., -t / 2.), (t / 2., -h / 2.),
# (-t / 2., -h / 2.), (-t / 2., -t / 2.),
# (-w / 2., -t / 2.), (-w / 2., t / 2.)]
am0 = Boundary(crosspts, layer=l) # Create gdsCAD shape
self.align_marker.add(am0)
# am1 = Polygon(crosspts) #Create shapely polygon for later calculation
if auto_marks: # automatic alignment marks for the e-beam tool
auto_mark_rect = Rectangle((-10., -10.), (10., 10.), layer=l)
auto_mark = Cell("AutoMark")
auto_mark.add(auto_mark_rect)
self.align_marker.add(auto_mark, origin=(100, 100))
self.align_marker.add(auto_mark, origin=(-100, 100))
self.align_marker.add(auto_mark, origin=(100, -100))
self.align_marker.add(auto_mark, origin=(-100, -100))
self.align_markers.add(self.align_marker,
origin=tuple(np.array(position) * [1, 1]))
self.align_markers.add(self.align_marker,
origin=tuple(np.array(position) * [-1, 1]))
self.align_markers.add(self.align_marker,
origin=tuple(np.array(position) * [1, -1]))
self.align_markers.add(self.align_marker,
origin=tuple(np.array(position) * [-1, -1]))
self.add(self.align_markers)
def make_align_markers(self,
t,
w,
position,
layers,
cross=False,
auto_align_marks=True):
if not (type(layers) == list):
layers = [layers]
self.align_markers = Cell("AlignMarks_Four")
align_mark = Cell("AlignMarks_Corner")
for l in layers:
if not cross:
am0 = Rectangle((-w / 2., -w / 2.), (w / 2., w / 2.), layer=l)
elif cross:
crosspts = [(0, 0), (w / 2., 0), (w / 2., t), (t, t),
(t, w / 2), (0, w / 2), (0, 0)]
crosspts.extend(
tuple(map(tuple, (-np.array(crosspts)).tolist())))
am0 = Boundary(crosspts, layer=l) # Create gdsCAD shape
align_cross = Cell('AlignCross')
align_cross.add(am0)
align_mark.add(align_cross)
if auto_align_marks:
aa_mark = Rectangle((-10, -10), (10, 10), layer=l)
auto_mark = Cell('AutoAlignMark')
auto_mark.add(aa_mark)
four_marks = Cell('FourAAMarks')
pos = [100., 100.]
four_marks.add(auto_mark, origin=tuple(np.array(pos) * [1, 1]))
four_marks.add(auto_mark,
origin=tuple(np.array(pos) * [-1, 1]))
four_marks.add(auto_mark,
origin=tuple(np.array(pos) * [1, -1]))
four_marks.add(auto_mark,
origin=tuple(np.array(pos) * [-1, -1]))
align_mark.add(four_marks)
self.align_markers.add(align_mark,
origin=tuple(np.array(position) * [1, 1]))
self.align_markers.add(align_mark,
origin=tuple(np.array(position) * [-1, 1]))
self.align_markers.add(align_mark,
origin=tuple(np.array(position) * [1, -1]))
self.align_markers.add(align_mark,
origin=tuple(np.array(position) * [-1, -1]))
self.add(self.align_markers)
def make_tapered_cross(self, nw1, nw2, tw1, tw2, l1, l2, tl1, tl2, layer):
cross_cell = Cell(
'TaperedCross_NW{:.0f}_TW{:.0f}_L{:.0f}_TL{:.0f}xNW{:.0f}_TW{:.0f}_L{:.0f}_TL{:.0f}'
.format(nw1 * 1000, tw1 * 1000, l1, tl1, nw2 * 1000, tw2 * 1000,
l2, tl2))
l1 += tw2
l2 += tw1
tl1 += tw2
tl2 += tl1
cross_pts = [(tw2 / 2., tw1 / 2.), (tl1, nw1 / 2.),
(l1 / 2., nw1 / 2.), (l1 / 2., -nw1 / 2.),
(tl1, -nw1 / 2.), (tw2 / 2., -tw1 / 2.),
(nw2 / 2., -tl2 / 2.), (nw2 / 2., -l2 / 2.),
(-nw2 / 2., -l2 / 2.), (-nw2 / 2., -tl2 / 2.),
(-tw2 / 2., -tw1 / 2.)]
cross_pts.extend(tuple(map(tuple, (-np.array(cross_pts)).tolist())))
membrane = Boundary(cross_pts, layer=layer) # Create gdsCAD shape
cross_cell.add(membrane)
return cross_cell
def makeAlignMarkers(self, t, w, position, layers, cross=False):
if not (type(layers) == list): layers = [layers]
self.aMarkers = Cell("AlignMarkers")
for l in layers:
if not (cross):
am1 = Rectangle((-w / 2., -w / 2.), (w / 2., w / 2.), layer=l)
elif cross:
h = w
crosspts = [(-t / 2., t / 2.), (-t / 2., h / 2.), (t / 2., h / 2.),
(t / 2., t / 2.), (w / 2., t / 2.), (w / 2., -t / 2.),
(t / 2., -t / 2.), (t / 2., -h / 2.),
(-t / 2., -h / 2.), (-t / 2., -t / 2.),
(-w / 2., -t / 2.), (-w / 2., t / 2.)]
am1 = Boundary(crosspts, layer=l) # Create gdsCAD shape
# am1 = Polygon(crosspts) #Create shapely polygon for later calculation
am1 = am1.translate(tuple(position)) # 850,850
am2 = am1.copy().scale((-1, 1)) # Reflect in x-axis
am3 = am1.copy().scale((1, -1)) # Reflect in y-axis
am4 = am1.copy().scale((-1, -1)) # Reflect in both x and y-axis
self.aMarkers.add([am1, am2, am3, am4])
self.add(self.aMarkers)