print "Interation index: %d, Costfunction value: %4f." % ( ii, self.error[ii]) if __name__ == '__main__': from lens import LensList from tcc import TCCList from mask import Mask from source import Source import time a = time.time() m = Mask() m.x_range = [-300.0, 300.0] m.y_range = [-300.0, 300.0] m.x_gridsize = 2.5 m.y_gridsize = 2.5 m.openGDS('./NanGateLibGDS/NOR2_X2.gds', 11, 0.3) m.maskfft() s = Source() s.na = 1.35 s.maskxpitch = m.x_range[1] - m.x_range[0] s.maskypitch = m.y_range[1] - m.y_range[0] s.type = 'annular' s.sigma_in = 0.7 s.sigma_out = 0.9 s.smooth_deta = 0.00 s.shiftAngle = 0 s.update()
self.resist_t = self.resist_tRef * jj self.calRI() self.RIList[ii].append(self.RI) if __name__ == "__main__": from tcc import TCCList, TCC from mask import Mask from source import Source from lens import LensList, Lens mp = [ [[-1,6],[-1, 2],[1, 2],[1, 1],[6, 1],[6, 0],[0, 0],[0, 1],[-2, 1],[-2, 6],[-1, 6]], \ [[6, -1],[6, -2],[1, -2],[1, -3],[4, -3],[4, -6],[3, -6],[3, -4],[0, -4],[0, -1],[6, -1]] ] m = Mask() m.x_range = [-300.0, 300.0] m.y_range = [-400.0, 300.0] m.x_gridsize = 1.0 m.y_gridsize = 1.0 m.CD = 40 m.polygons = mp m.poly2mask() m.smooth() m.maskfft() """nominal ILT setting""" s = Source() s.na = 1.35 s.maskxpitch = 600.0 s.maskypitch = 800.0 s.type = 'annular' s.sigma_in = 0.6 s.sigma_out = 0.8
self.updateThetaConstSize() print "Interation index: %d, Costfunction value: %4f." %(ii, self.error[ii]) if __name__ == '__main__' : from lens import LensList from tcc import TCCList from mask import Mask from source import Source import time a = time.time() m = Mask() m.x_range = [-300.0,300.0] m.y_range = [-300.0,300.0] m.x_gridsize = 2.5 m.y_gridsize = 2.5 m.openGDS('./NanGateLibGDS/NOR2_X2.gds',11,0.3) m.maskfft() s = Source() s.na = 1.35 s.maskxpitch = m.x_range[1] - m.x_range[0] s.maskypitch = m.y_range[1] - m.y_range[0] s.type = 'annular' s.sigma_in = 0.7 s.sigma_out = 0.9 s.smooth_deta = 0.00 s.shiftAngle = 0 s.update()
for jj in self.doseList: self.resist_t = self.resist_tRef*jj self.calRI() self.RIList[ii].append(self.RI) if __name__ == "__main__": from tcc import TCCList,TCC from mask import Mask from source import Source from lens import LensList, Lens mp = [ [[-1,6],[-1, 2],[1, 2],[1, 1],[6, 1],[6, 0],[0, 0],[0, 1],[-2, 1],[-2, 6],[-1, 6]], \ [[6, -1],[6, -2],[1, -2],[1, -3],[4, -3],[4, -6],[3, -6],[3, -4],[0, -4],[0, -1],[6, -1]] ] m = Mask() m.x_range = [-300.0,300.0] m.y_range = [-400.0,300.0] m.x_gridsize = 1.0 m.y_gridsize = 1.0 m.CD = 40 m.polygons = mp m.poly2mask() m.smooth() m.maskfft() """nominal ILT setting""" s = Source() s.na = 1.35 s.maskxpitch = 600.0 s.maskypitch = 800.0 s.type = 'annular' s.sigma_in = 0.6