def makeSlitArray(pitches, spacing, widths, lengths, rotAngle, arrayHeight,
arraySpacing, layers):
'''
Give it a single pitch and width and it will generate an array for all the lengths
'''
if not (type(layers) == list): layers = [layers]
if not (type(pitches) == list): pitches = [pitches]
if not (type(lengths) == list): lengths = [lengths]
if not (type(widths) == list): widths = [widths]
for l in layers:
i = -1
j = -1
manyslits = Cell("SlitArray")
slitarray = Cell("SlitArray")
pitch = pitches[0]
width = widths[0]
j += 1
i = -1
xlength = 0
slit = Cell("Slits")
for length in lengths:
spacing = length / 5. + 0.1
i += 1
pitchV = pitch / np.cos(np.deg2rad(rotAngle))
# widthV = width / np.cos(np.deg2rad(rotAngle))
# Nx = int(arrayWidth / (length + spacing))
Ny = int(arrayHeight / (pitchV))
# Define the slits
if xlength == 0:
translation = (length / 2., 0)
xlength += length
else:
translation = (xlength + spacing + length / 2., 0)
xlength += length + spacing
pt1 = np.array((-length / 2., -width / 2.)) + translation
pt2 = np.array((length / 2., width / 2.)) + translation
rect = Rectangle(pt1, pt2, layer=l)
rect = rect.copy().rotate(rotAngle)
slit.add(rect)
slits = CellArray(slit, 1, Ny, (0, pitchV))
# slits.translate((-(Nx - 1) * (length + spacing) / 2., -(Ny - 1)* (pitchV) / 2.))
slits.translate(
(-slits.bounding_box[1, 0] / 2., -slits.bounding_box[1, 1] / 2.))
slitarray.add(slits)
text = Label('w/p\n%i/%i' % (width * 1000, pitch * 1000), 2)
lblVertOffset = 1.4
text.translate(
tuple(
np.array(-text.bounding_box.mean(0)) +
np.array((0, arrayHeight /
lblVertOffset)))) # Center justify label
slitarray.add(text)
# manyslits.add(slitarray,origin=((arrayWidth + arraySpacing) * i, (arrayHeight + 2.*arraySpacing) * j-arraySpacing/2.))
manyslits.add(slitarray)
# self.add(manyslits, origin=(-i * (arrayWidth + arraySpacing) / 2, -j * (arrayHeight + arraySpacing) / 2))
# self.add(manyslits)
return manyslits
def makeSlitArray3(pitches, spacing, widths, lengths, rotAngle,
arrayHeight, arrayWidth, arraySpacing, layers):
'''
Give it a single pitch and arrays for spacings/widths and it will generate an array for all the combinations
Makes seperate frame for each pitch
'''
if not (type(layers) == list): layers = [layers]
if not (type(pitches) == list): pitches = [pitches]
if not (type(lengths) == list): lengths = [lengths]
if not (type(widths) == list): widths = [widths]
for l in layers:
i = -1
j = -1
manyslits = Cell("SlitArray")
length = lengths[0]
spacing = length / 5. + 0.1 # Set the spacing between arrays
for pitch in pitches:
j += 1
i = -1
for width in widths:
# for pitch in pitches:
i += 1
if i % 3 == 0:
j += 1 # Move to array to next line
i = 0 # Restart at left
pitchV = pitch / np.cos(np.deg2rad(rotAngle))
# widthV = width / np.cos(np.deg2rad(rotAngle))
Nx = int(arrayWidth / (length + spacing))
Ny = int(arrayHeight / (pitchV))
# Define the slits
slit = Cell("Slits")
rect = Rectangle(
(-length / 2., -width / 2.),
(length / 2., width / 2.),
layer=l)
rect = rect.copy().rotate(rotAngle)
slit.add(rect)
slits = CellArray(slit, Nx, Ny,
(length + spacing, pitchV))
slits.translate((-(Nx - 1) * (length + spacing) / 2., -(Ny - 1) * (pitchV) / 2.))
slitarray = Cell("SlitArray")
slitarray.add(slits)
text = Label('w/p/l\n%i/%i/%i' % (width * 1000, pitch * 1000, length * 1000), 2)
lblVertOffset = 1.35
if j % 2 == 0:
text.translate(
tuple(np.array(-text.bounding_box.mean(0)) + np.array((
0, -arrayHeight / lblVertOffset)))) # Center justify label
else:
text.translate(
tuple(np.array(-text.bounding_box.mean(0)) + np.array((
0, arrayHeight / lblVertOffset)))) # Center justify label
slitarray.add(text)
manyslits.add(slitarray,
origin=((arrayWidth + arraySpacing) * i, (
arrayHeight + 2. * arraySpacing) * j - arraySpacing / 2.))
return manyslits
def slit_elongation_array(pitches, spacing, widths, lengths, rot_angle,
array_height, array_spacing, layers):
if not (type(layers) == list):
layers = [layers]
if not (type(pitches) == list):
pitches = [pitches]
if not (type(lengths) == list):
lengths = [lengths]
if not (type(widths) == list):
widths = [widths]
for l in layers:
j = -1
manyslits = Cell("SlitArray")
slitarray = Cell("SlitArray")
pitch = pitches[0]
width = widths[0]
j += 1
i = -1
x_length = 0
slit = Cell("Slits")
for length in lengths:
spacing = length / 5. + 0.1
i += 1
pitch_v = pitch / np.cos(np.deg2rad(rot_angle))
n_y = int(array_height / pitch_v)
# Define the slits
if x_length == 0:
translation = (length / 2., 0)
x_length += length
else:
translation = (x_length + spacing + length / 2., 0)
x_length += length + spacing
pt1 = np.array((-length / 2., -width / 2.)) + translation
pt2 = np.array((length / 2., width / 2.)) + translation
rect = Rectangle(pt1, pt2, layer=l)
rect = rect.copy().rotate(rot_angle)
slit.add(rect)
slits = CellArray(slit, 1, n_y, (0, pitch_v))
slits.translate(
(-slits.bounding_box[1, 0] / 2., -slits.bounding_box[1, 1] / 2.))
slitarray.add(slits)
text = Label('w/p\n%i/%i' % (width * 1000, pitch * 1000), 2)
lbl_vert_offset = 1.4
text.translate(
tuple(
np.array(-text.bounding_box.mean(0)) +
np.array((0, array_height /
lbl_vert_offset)))) # Center justify label
slitarray.add(text)
manyslits.add(slitarray)
return manyslits
def make_align_markers(self,
t,
w,
position,
layers,
cross=False,
auto_marks=False):
if not (type(layers) == list):
layers = [layers]
self.align_markers = Cell("AlignMarkers")
self.align_marker = Cell("AlignMarker")
for l in layers:
if not cross:
am0 = Rectangle((-w / 2., -w / 2.), (w / 2., w / 2.), layer=l)
self.align_marker.add(am0)
elif cross:
crosspts = [(0, 0), (w / 2., 0), (w / 2., t), (t, t),
(t, w / 2), (0, w / 2), (0, 0)]
crosspts.extend(
tuple(map(tuple, (-np.array(crosspts)).tolist())))
# crosspts = [(-t / 2., t / 2.), (-t / 2., h / 2.), (t / 2., h / 2.),
# (t / 2., t / 2.), (w / 2., t / 2.), (w / 2., -t / 2.),
# (t / 2., -t / 2.), (t / 2., -h / 2.),
# (-t / 2., -h / 2.), (-t / 2., -t / 2.),
# (-w / 2., -t / 2.), (-w / 2., t / 2.)]
am0 = Boundary(crosspts, layer=l) # Create gdsCAD shape
self.align_marker.add(am0)
# am1 = Polygon(crosspts) #Create shapely polygon for later calculation
if auto_marks: # automatic alignment marks for the e-beam tool
auto_mark_rect = Rectangle((-10., -10.), (10., 10.), layer=l)
auto_mark = Cell("AutoMark")
auto_mark.add(auto_mark_rect)
self.align_marker.add(auto_mark, origin=(100, 100))
self.align_marker.add(auto_mark, origin=(-100, 100))
self.align_marker.add(auto_mark, origin=(100, -100))
self.align_marker.add(auto_mark, origin=(-100, -100))
self.align_markers.add(self.align_marker,
origin=tuple(np.array(position) * [1, 1]))
self.align_markers.add(self.align_marker,
origin=tuple(np.array(position) * [-1, 1]))
self.align_markers.add(self.align_marker,
origin=tuple(np.array(position) * [1, -1]))
self.align_markers.add(self.align_marker,
origin=tuple(np.array(position) * [-1, -1]))
self.add(self.align_markers)
def makeArrowShape(self, length, width, rotAngle, spacing, Nx, Ny, layers):
if not (type(layers) == list): layers = [layers]
pt1 = np.array((-width * 0.3, -width / 2.))
pt2 = np.array((length, width / 2.))
slit = Cell("Slit")
for l in layers:
rect = Rectangle(pt1, pt2, layer=l)
slit.add(rect)
shape = Cell('Shapes')
shape.add(slit, rotation=-120)
shape.add(slit, rotation=120)
xspacing = (width + spacing) / np.cos(np.deg2rad(30))
yspacing = (length + spacing / 2.) * np.sin(np.deg2rad(60))
shapearray = CellArray(shape,
Nx,
Ny, (xspacing, yspacing * 2.),
origin=(-(Nx * xspacing - spacing) / 2.,
-(Ny * yspacing - spacing) / 2.))
allshapes = Cell('All Shapes')
allshapes.add(shapearray)
# allshapes.add(shapearray2)
# allshapes.add(shape)
self.add(allshapes)
def makeXShape(self, length, width, rotAngle, spacing, Nx, Ny, layers):
if not (type(layers) == list): layers = [layers]
pt1 = np.array((-length / 2., -width / 2.))
pt2 = np.array((length / 2., width / 2.))
slit = Cell("Slit")
for l in layers:
rect = Rectangle(pt1, pt2, layer=l)
slit.add(rect)
shape = Cell('Shapes')
shape.add(slit, rotation=60)
shape.add(slit, rotation=120)
xspacing = (length + spacing) * np.cos(np.deg2rad(60))
yspacing = (length + spacing) * np.sin(np.deg2rad(60))
shapearray = CellArray(shape,
Nx,
Ny, (xspacing, yspacing),
origin=(-(Nx * xspacing - spacing) / 2.,
-(Ny * yspacing - spacing) / 2.))
# shapearray2 = CellArray(shape, Nx, Ny/2,(xspacing,yspacing*2.),origin=(xspacing/2.-(Nx*xspacing-spacing)/2.,yspacing-(Ny*yspacing-spacing*np.tan(np.deg2rad(60)))/2.))
# shapearray = CellArray(shape, Nx, Ny,(xspacing,yspacing))
# shapearray.rotate(rotAngle)
# shapearray.translate((-shapearray.bounding_box.mean(0)[0]/2.,-shapearray.bounding_box.mean(0)[1]/2.))
allshapes = Cell('All Shapes')
allshapes.add(shapearray)
# allshapes.add(shapearray2)
# allshapes.add(shape)
self.add(allshapes)
def makeYShapes(self, length, width, rotAngle, spacing, Nx, Ny, layers):
if not (type(layers) == list): layers = [layers]
pt1 = np.array((0, -width / 2.))
pt2 = np.array((length, width / 2.))
slit = Cell("Slit")
for l in layers:
rect = Rectangle(pt1, pt2, layer=l)
slit.add(rect)
shape = Cell('Shapes')
shape.add(slit, rotation=0 + rotAngle)
shape.add(slit, rotation=120 + rotAngle)
shape.add(slit, rotation=240 + rotAngle)
# CellArray(slit, Nx, Ny,(length + spacing, pitchV))
xspacing = length + spacing
yspacing = (length + spacing) * np.sin(np.deg2rad(60))
shapearray = CellArray(
shape,
Nx,
Ny / 2, (xspacing, yspacing * 2.),
origin=(-(Nx * xspacing - spacing) / 2.,
-(Ny * yspacing - spacing * np.sin(np.deg2rad(60))) /
2.))
shapearray2 = CellArray(
shape,
Nx,
Ny / 2, (xspacing, yspacing * 2.),
origin=(
xspacing / 2. - (Nx * xspacing - spacing) / 2., yspacing -
(Ny * yspacing - spacing * np.sin(np.deg2rad(60))) / 2.))
allshapes = Cell('All Shapes')
allshapes.add(shapearray)
allshapes.add(shapearray2)
self.add(allshapes)
def make_rotating_slits(length, width, N, radius, layers, angleRef=False):
cell = Cell('RotatingSlits')
if not (type(layers) == list): layers = [layers]
allslits = Cell('All Slits')
angles = np.linspace(0, 360, N)
# radius = length*12.
translation = (radius, 0)
pt1 = np.array((-length / 2., -width / 2.)) + translation
pt2 = np.array((length / 2., width / 2.)) + translation
slit = Cell("Slit")
for l in layers:
rect = Rectangle(pt1, pt2, layer=l)
slit.add(rect)
for angle in angles:
allslits.add(slit.copy(), rotation=angle)
cell.add(allslits)
if angleRef:
labelCell = Cell('AngleLabels')
lineCell = Cell('Line')
pt1 = (-radius * 0.9, 0)
pt2 = (radius * 0.9, 0)
line = Path([pt1, pt2], width=width, layer=l)
dLine = dashed_line(pt1, pt2, 2, width, l)
lineCell.add(line)
labelCell.add(lineCell, rotation=0)
labelCell.add(lineCell, rotation=60)
labelCell.add(lineCell, rotation=-60)
labelCell.add(dLine, rotation=30)
labelCell.add(dLine, rotation=90)
labelCell.add(dLine, rotation=-30)
cell.add(labelCell)
return cell
def make_align_markers(self, t, w, position, layers, cross=False):
if not (type(layers) == list):
layers = [layers]
self.align_markers = Cell("AlignMarkers")
for l in layers:
if not cross:
am0 = Rectangle((-w / 2., -w / 2.), (w / 2., w / 2.), layer=l)
elif cross:
crosspts = [(0, 0), (w / 2., 0), (w / 2., t), (t, t),
(t, w / 2), (0, w / 2), (0, 0)]
crosspts.extend(
tuple(map(tuple, (-np.array(crosspts)).tolist())))
# crosspts = [(-t / 2., t / 2.), (-t / 2., h / 2.), (t / 2., h / 2.),
# (t / 2., t / 2.), (w / 2., t / 2.), (w / 2., -t / 2.),
# (t / 2., -t / 2.), (t / 2., -h / 2.),
# (-t / 2., -h / 2.), (-t / 2., -t / 2.),
# (-w / 2., -t / 2.), (-w / 2., t / 2.)]
am0 = Boundary(crosspts, layer=l) # Create gdsCAD shape
# am1 = Polygon(crosspts) #Create shapely polygon for later calculation
am1 = am0.copy().translate(tuple(np.array(position) *
[1, 1])) # 850,850
am2 = am0.copy().translate(tuple(np.array(position) *
[-1, 1])) # 850,850
am3 = am0.copy().translate(tuple(np.array(position) *
[1, -1])) # 850,850
am4 = am0.copy().translate(tuple(np.array(position) *
[-1, -1])) # 850,850
# am4 = am0.copy().scale((-1, -1)) #Reflect in both x and y-axis
self.align_markers.add([am1, am2, am3, am4])
self.add(self.align_markers)
def make_branch(length, width, layers, rot_angle=0):
pt1 = np.array((0, -width / 2.))
pt2 = np.array((length, width / 2.))
slit = Cell("Slit")
for l in layers:
rect = Rectangle(pt1, pt2, layer=l)
slit.add(rect)
branch = Cell('Branch-{}/{}-lw'.format(length, width))
branch.add(slit, rotation=0 + rot_angle)
branch.add(slit, rotation=120 + rot_angle)
branch.add(slit, rotation=240 + rot_angle)
return branch
def processCheck_Slits(self, position, arrayWidth, slitWidth, pitch,
length, rotation, layers):
if not (type(layers) == list): layers = [layers]
Nx = int(arrayWidth / pitch)
Ny = 1
for l in layers:
# Define the slits
slit = Cell("Slits")
rect = Rectangle((-slitWidth / 2., -length / 2.),
(slitWidth / 2., length / 2.),
layer=l)
slit.add(rect)
slits = CellArray(slit, Nx, Ny, (pitch, 0))
slits.translate((-(Nx) * (pitch) / 2., 0.))
slits.translate(position)
slitarray = Cell("ProcessCheckingSlits")
slitarray.add(slits)
self.add(slitarray)
def make_rotating_slits(length,
width,
N,
radius,
layers,
angle_sweep=360,
angle_ref=False):
cell = Cell('RotatingSlits')
if not (type(layers) == list): layers = [layers]
allslits = Cell('All Slits')
angles = np.linspace(0, angle_sweep, N)
# radius = length*12.
translation = (radius, 0)
pt1 = np.array((-length / 2., -width / 2.)) + translation
pt2 = np.array((length / 2., width / 2.)) + translation
slit = Cell("Slit")
for l in layers:
rect = Rectangle(pt1, pt2, layer=l)
slit.add(rect)
for angle in angles:
allslits.add(slit.copy(), rotation=angle)
cell.add(allslits)
for l in layers:
if angle_ref:
label_cell = Cell('AngleLabels')
line_cell = Cell('Line')
pt1 = (0, 0)
pt2 = (radius * 0.9, 0)
line = Path([pt1, pt2], width=width, layer=l)
d_line = dashed_line(pt1, pt2, 2, width, l)
line_cell.add(line)
rot_angle = 0
while True:
if abs(rot_angle) > abs(angle_sweep):
break
if abs(rot_angle) % 60 == 0:
label_cell.add(line_cell, rotation=rot_angle)
if (abs(rot_angle) - 30) % 60 == 0:
label_cell.add(d_line, rotation=rot_angle)
rot_angle += np.sign(angle_sweep) * 15
cell.add(label_cell)
return cell
def makeAlignMarkers(self, t, w, position, layers, cross=False):
if not (type(layers) == list): layers = [layers]
self.aMarkers = Cell("AlignMarkers")
for l in layers:
if not (cross):
am1 = Rectangle((-w / 2., -w / 2.), (w / 2., w / 2.), layer=l)
elif cross:
h = w
crosspts = [(-t / 2., t / 2.), (-t / 2., h / 2.), (t / 2., h / 2.),
(t / 2., t / 2.), (w / 2., t / 2.), (w / 2., -t / 2.),
(t / 2., -t / 2.), (t / 2., -h / 2.),
(-t / 2., -h / 2.), (-t / 2., -t / 2.),
(-w / 2., -t / 2.), (-w / 2., t / 2.)]
am1 = Boundary(crosspts, layer=l) # Create gdsCAD shape
# am1 = Polygon(crosspts) #Create shapely polygon for later calculation
am1 = am1.translate(tuple(position)) # 850,850
am2 = am1.copy().scale((-1, 1)) # Reflect in x-axis
am3 = am1.copy().scale((1, -1)) # Reflect in y-axis
am4 = am1.copy().scale((-1, -1)) # Reflect in both x and y-axis
self.aMarkers.add([am1, am2, am3, am4])
self.add(self.aMarkers)
# %%Create the layout and output GDS file
layout = Layout('LIBRARY', precision=1e-10)
wafer = MBEWafer('MembranesWafer',
wafer_r=wafer_r,
cells=[topCell],
cell_gap=CELL_GAP,
mkWidth=tDicingMarks,
cellsAtEdges=False)
file_string = str(waferVer)
filename = file_string.replace(' ', '_')
# Add pattern for ellipsometry check of SiO2 etching
size = 2000
rect = Rectangle((size / 2., size / 2.), (-size / 2., -size / 2.), layer=10)
rectCell = Cell('EtchCheckSquare')
rectCell.add(rect)
rect_layout = Layout('LIBRARY')
rect_layout.add(rectCell)
rect_layout.save(filename + '_etchCheck.gds')
rect_layout.add(rectCell)
# wafer.add(rectCell, origin=(0, -2000))
layout.add(wafer)
layout.save(filename + '.gds')
# Output down chip for doing aligned jobs
layout_down = Layout('LIBRARY')
layout_down.add(wafer.block_down)
layout_down.save(filename + '_downblock.gds')
def make_slit_array(x_vars, y_vars, stat_vars, var_names, spacing, rot_angle,
array_height, array_width, array_spacing, layers):
if len(var_names) != 3:
raise Exception('Error! Need to have three variable names.')
if not (type(layers) == list):
layers = [layers]
if not (type(x_vars) == list):
x_vars = [x_vars]
if not (type(y_vars) == list):
y_vars = [y_vars]
if not (type(stat_vars) == list):
stat_vars = [stat_vars]
x_var_name = var_names[0]
y_var_name = var_names[1]
stat_var_name = var_names[2]
for l in layers:
j = -1
manyslits = Cell("SlitArray")
for x_var in x_vars:
j += 1
i = -1
for y_var in y_vars:
i += 1
if i % 3 == 0:
j += 1 # Move to array to next line
i = 0 # Restart at left
var_dict = {
x_var_name: x_var,
y_var_name: y_var,
stat_var_name: stat_vars[0]
}
pitch = var_dict['pitch']
width = var_dict['width']
length = var_dict['length']
pitch_v = pitch / np.cos(np.deg2rad(rot_angle))
# widthV = width / np.cos(np.deg2rad(rotAngle))
n_x = int(array_width / (length + spacing))
n_y = int(array_height / pitch_v)
# Define the slits
slit = Cell("Slits")
rect = Rectangle((-length / 2., -width / 2.),
(length / 2., width / 2.),
layer=l)
rect = rect.copy().rotate(rot_angle)
slit.add(rect)
slits = CellArray(slit, n_x, n_y, (length + spacing, pitch_v))
slits.translate((-(n_x - 1) * (length + spacing) / 2.,
-(n_y - 1) * pitch_v / 2.))
slit_array = Cell("SlitArray")
slit_array.add(slits)
text = Label(
'w/p/l\n%i/%i/%i' %
(width * 1000, pitch * 1000, length * 1000), 2)
lbl_vert_offset = 1.35
if j % 2 == 0:
text.translate(
tuple(
np.array(-text.bounding_box.mean(0)) +
np.array((0, -array_height / lbl_vert_offset)))
) # Center justify label
else:
text.translate(
tuple(
np.array(-text.bounding_box.mean(0)) +
np.array((0, array_height / lbl_vert_offset)))
) # Center justify label
slit_array.add(text)
manyslits.add(slit_array,
origin=((array_width + array_spacing) * i,
(array_height + 2. * array_spacing) * j -
array_spacing / 2.))
return manyslits
def make_arm(width, length, layer, cell_name='branch'):
cell = Cell(cell_name)
rect = Rectangle((0, -width / 2.), (length, width / 2.), layer=layer)
cell.add(rect)
return cell